Publications
Found 2 results
Author [ Title] Type Year Filters: First Letter Of Title is M and Author is Yan, Gui Zhen [Clear All Filters]
"A monolithic inertial measurement unit fabricated with improved DRIE post-CMOS process", 2010 Ninth IEEE Sensors Conference (SENSORS 2010)2010 IEEE Sensors, Kona, HI, IEEE, pp. 1198 - 1202, 2010.
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