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Zhang, X., L. Zhou, and H. Xie, "A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives", 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, IEEE, pp. 71 - 74, 01/2016.