Publications

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Conference Paper
Cheng, X., H. Lu, Z. Lou, H. Xie, W. Wang, and M. Zheng, "An integrated optoelectronic position sensor for MEMS scanning mirrors", 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, IEEE, 2017.