Publications

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H
Jia, K., S. Pal, and H. Xie, "High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, Clearwater Beach, FL, pp. 67 -68, 08/2009.