Found 8 results
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Zhou, L., Z. Li, M. Liang, Y. Chen, X. Zhang, and H. Xie, "A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage", MOEMS and Miniaturized Systems XVIIIMOEMS and Miniaturized Systems XVIII, San Francisco, United States, SPIE, 2019.
Zhang, X., L. Zhou, and H. Xie, "A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph", Micromachines, vol. 6, issue 12, pp. 1876 - 1889, 12/2015.
Pal, S., and H. Xie, "Fabrication of robust electrothermal MEMS devices using aluminum–tungsten bimorphs and polyimide thermal isolation", Journal of Micromechanics and Microengineering, vol. 22, issue 11, pp. 115036, 11/2012.
Liu, L., L. Wu, P. Zory, and H. Xie, "Fiber-optic confocal microscope with an electrothermally-actuated, large-tunable-range microlens scanner for depth scanning", 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Wanchai, Hong Kong, China, IEEE, pp. 827 - 830, 2010.
Qu, H., D. Fang, and H. Xie, "Fabrication and Characterization of an Integrated CMOS-MEMS Accelerometer", Nanotech 2007, Santa Clara, California, USA, 2007.
Xie, H., and G. K. Fedder, "Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope", IEEE Sensors Journal, vol. 3, issue 5, pp. 622 - 631, 10/2003.