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Sawant, S. G., N. Wang, M. S. Hanna, C. R. Taylor, and D. P. Arnold, "Fabrication, Characterization, and Modeling of Fully-Batch-Fabricated Piston-Type Electrodynamic Microactuators", Journal of Microelectromechanical Systems, vol. 23, no. 1, pp. 220-229, 2013, 2014.