Publications

Found 4 results
Author Title Type [ Year(Desc)]
Filters: First Letter Of Title is E and Author is Zhou, Liang  [Clear All Filters]
2017
Xie, H., X. Zhang, L. Zhou, and S. Pal, "Electrothermally actuated MEMS mirrors", Optical MEMS, Nanophotonics, and Their Applications, 1: CRC Press, pp. 159 - 186, 2017.
2019
Zhou, L., X. Zhang, and H. Xie, "An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability", Micromachines, vol. 10, issue 5, pp. 323, Jan-05-2019.
Zhou, L., D. Wang, and H. Xie, "An Electrothermal Micromirror with J-shaped Bimorph Microactuators", 2019 International Conference on Optical MEMS and Nanophotonics (OMN)2019 International Conference on Optical MEMS and Nanophotonics (OMN), Daejeon, Korea (South), IEEE, 2019.
Xie, H., S. Koppal, X. Zhang, L. Zhou, and C. Duan, Endoscopic OCT probes with immersed mems mirrors, no. US20190150715A1, 2019.