Publications
Found 2 results
[ Author] Title Type Year Filters: First Letter Of Title is E and Author is Zhou, Liang [Clear All Filters]
"An Electrothermal Micromirror with J-shaped Bimorph Microactuators", 2019 International Conference on Optical MEMS and Nanophotonics (OMN)2019 International Conference on Optical MEMS and Nanophotonics (OMN), Daejeon, Korea (South), IEEE, 2019.
, "An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability", Micromachines, vol. 10, issue 5, pp. 323, Jan-05-2019.
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