Publications

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Conference Paper
Wang, H., X. Zhang, D. Zhang, L. Zhou, and H. Xie, "Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.