Publications

Found 3 results
Author Title [ Type(Desc)] Year
Filters: First Letter Of Title is A and Author is Benjamin A. Griffin  [Clear All Filters]
Conference Paper
Williams, M. D., B. A. Griffin, A. Ecker, J. Meloy, and M. Sheplak, "An Aluminum Nitride Piezoelectric Microphone for Aeroacoustics Applications", Hilton Head 2010: A Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, Transducer Research Foundation, Inc., 06/2010.
Journal Article
Williams, M. D., B. A. Griffin, T. N. Reagan, J. R. Underbrink, and M. Sheplak, "An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications", Journal of Microelectromechanical Systems, vol. 21, no. 2, 04/2012.
Griffin, B. A., M. D. Williams, C. S. Coffman, and M. Sheplak, "Aluminum Nitride Ultrasonic Air-Coupled Actuator ", Journal of Microelectromechanical Systems, vol. 20, no. 2, pp. 476-486, 04/2011.