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Cheng, J., W. Liu, Q. Chen, N. Xu, Q. Sun, Y. Liu, W. Wang, and H. Xie, "An auto-aligned vertical comb drive for low-cost variable optical attenuators", 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, IEEE, 2017.