Publications

Found 25 results
Author Title [ Type(Desc)] Year
Filters: Author is Liang Zhou  [Clear All Filters]
Book Chapter
Xie, H., X. Zhang, L. Zhou, and S. Pal, "Electrothermally actuated MEMS mirrors", Optical MEMS, Nanophotonics, and Their Applications, 1: CRC Press, pp. 159 - 186, 2017.
Conference Paper
Wang, W., Q. Chen, D. Wang, L. Zhou, and H. Xie, "A bi-directional large-stroke electrothermal MEMS mirror with minimal thermal and temporal drift", 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, USA, IEEE, 2017.
Wang, H., X. Zhang, D. Zhang, L. Zhou, and H. Xie, "Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
Yang, B., L. Zhou, X. Zhang, S. Koppal, and H. Xie, "A compact MEMS-based wide-angle optical scanner", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
Zhou, L., Y. Chen, X. Chen, Y. Hao, J. Coleman, and H. Xie, "Development of an electrothermal MEMS mirror based two-photon microscopy probe", Multiphoton Microscopy in the Biomedical Sciences XIXMultiphoton Microscopy in the Biomedical Sciences XIX, San Francisco, United States, SPIE, 2019.
Zhou, L., D. Wang, and H. Xie, "An Electrothermal Micromirror with J-shaped Bimorph Microactuators", 2019 International Conference on Optical MEMS and Nanophotonics (OMN)2019 International Conference on Optical MEMS and Nanophotonics (OMN), Daejeon, Korea (South), IEEE, 2019.
Zhou, L., Z. Li, M. Liang, Y. Chen, X. Zhang, and H. Xie, "A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage", MOEMS and Miniaturized Systems XVIIIMOEMS and Miniaturized Systems XVIII, San Francisco, United States, SPIE, 2019.
Zhang, X., L. Zhou, and H. Xie, "A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives", 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, IEEE, pp. 71 - 74, 01/2016.
Zhou, L., X. Zhang, Y. Sung, W-C. Shih, and H. Xie, "A Miniature Lens Scanner with an Electrothermally-Actuated Micro-Stage", 2018 International Conference on Optical MEMS and Nanophotonics (OMN)2018 International Conference on Optical MEMS and Nanophotonics (OMN), Lausanne, Switzerland, IEEE, 2018.
Zhou, L., and H. Xie, "A Novel Out-of-Plane Electrothermal Bistable Microactuator", 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII, Berlin, Germany, IEEE, 2019.
Zhou, L., X. Yu, and H. Xie, "A Robust Compact Lens Scanner with Large Tunable Range", 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, BC, Canada, IEEE, 2020.
Wang, D., X. Zhang, L. Zhou, M. Liang, D. Zhang, and H. Xie, "An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
Zhang, X., L. Zhou, C. Duan, D. Zheng, S. Koppal, Q. Tanguy, and H. Xie, "A wide-angle immersed MEMS mirror and its application in optical coherence tomography", 2016 International Conference on Optical MEMS and Nanophotonics (OMN), Singapore, Singapore, IEEE, 2016.
Journal Article
Luo, S., D. Wang, J. Tang, L. Zhou, C. Duan, D. Wang, H. Liu, Y. Zhu, G. Li, H. Zhao, et al., "Circumferential-scanning endoscopic optical coherence tomography probe based on a circular array of six 2-axis MEMS mirrors", Biomedical Optics Express, vol. 9, issue 5, pp. 2104, Jan-01-2018.
Zhou, L., X. Zhang, and H. Xie, "An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability", Micromachines, vol. 10, issue 5, pp. 323, Jan-05-2019.
Zhang, X., L. Zhou, and H. Xie, "A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph", Micromachines, vol. 6, issue 12, pp. 1876 - 1889, 12/2015.
Cheng, X., X. Sun, Y. Liu, L. Zhu, X. Zhang, L. Zhou, and H. Xie, "Integrated Optoelectronic Position Sensor for Scanning Micromirrors", Sensors, vol. 18, issue 4, pp. 982, Jan-04-2018.
Zhou, L., X. Yu, P. Feng, J. Li, and H. Xie, "A MEMS lens scanner based on serpentine electrothermal bimorph actuators for large axial tuning", Optics Express, Jul-22-2020.
Luo, S., L. Zhou, D. Wang, C. Duan, H. Liu, Y. Zhu, G. Li, H. Zhao, J. Tang, Y. Wu, et al., "A Miniature Endoscopic Optical Coherence Tomography Probe Based on C-Lens", IEEE Photonics Journal, vol. 10, issue 5, pp. 1 - 10, Jan-10-2018.
Luo, S., Q. Guo, H. Zhao, X. An, L. Zhou, H. Xie, J. Tang, X. Wang, H. Chen, and L. Huo, "Noise Reduction of Swept-Source Optical Coherence Tomography via Compressed Sensing", IEEE Photonics Journal, vol. 10, issue 1, pp. 1 - 9, Jan-02-2018.
Duan, C., W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, "A Self-Aligned 45°-Tilted Two-Axis Scanning Micromirror for Side-View Imaging", Journal of Microelectromechanical Systems, vol. 4, pp. 799-811, 2016.
Wang, H., L. Zhou, X. Zhang, and H. Xie, "Thermal Reliability Study of an Electrothermal MEMS Mirror", IEEE Transactions on Device and Materials Reliability, pp. 1 - 1, Jan-01-2018.
Park, H-C., X. Zhang, W. Yuan, L. Zhou, H. Xie, and X. Li, "Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT", Optics Letters, vol. 44, issue 9, pp. 2232, Jan-01-2019.
Zhang, X., S. J. Koppal, R. Zhang, L. Zhou, E. Butler, and H. Xie, "Wide-angle structured light with a scanning MEMS mirror in liquid", Optics Express, vol. 24, issue 4, no. 4, pp. 3479-3487, 02/2016.