Publications

Found 36 results
Author Title Type [ Year(Desc)]
Filters: Author is Zhang, Xiaoyang  [Clear All Filters]
2013
Liu, L., E. Wang, X. Zhang, Y. Tang, and H. Xie, "Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans", Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp. 1085-1088, Jan, 2013.
Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.
Zhang, X., L. Liu, W. Liang, X. Li, and H. Xie, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.
Pal, S., S.R. Samuelson, X. Zhang, and H. Xie, "Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 1587-1590, June, 2013.
Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.
2015
Duan, C., W. Wang, X. Zhang, J. Ding, Q. Chen, A. Pozzi, and H. Xie, "A 45°-tilted 2-axis scanning micromirror integrated on a silicon optical bench for 3D endoscopic optical imaging", 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal, IEEE, pp. 948 - 951, 1/2015.
Zhang, X., L. Zhou, and H. Xie, "A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph", Micromachines, vol. 6, issue 12, pp. 1876 - 1889, 12/2015.
Zhang, X., R. Zhang, S. Koppal, L. Butler, X. Cheng, and H. Xie, "MEMS mirrors submerged in liquid for wide-angle scanning", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 847 - 850, 2015.
Zhang, H., D. Xu, X. Zhang, Q. Chen, H. Xie, and S. Li, "Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror", Sensors, vol. 15, issue 12, pp. 30991 - 31004, Jan-12-2015.
Zhang, X., C. Duan, L. Liu, X. Li, and H. Xie, "A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage", Sensors and Actuators A: Physical, vol. 233, pp. 239 - 245, 09/2015.
Zhang, X., B. Li, X. Li, and H. Xie, "A robust, fast electrothermal micromirror with symmetric bimorph actuators made of copper/tungsten", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 912 - 915, 6/2015.
2016
Wang, D., C. Duan, X. Zhang, Z. Yun, A. Pozzi, and H. Xie, "Common-path optical coherence tomography using a microelectromechanical-system-based endoscopic probe", Applied Optics, vol. 55, issue 25, pp. 6930, Jan-01-2016.
Park, H-C., X. Zhang, J. Mavadia-Shukla, W. Yuan, H. Xie, and X. Li, "Electro-thermal MEMS fiber scanner for endoscopic optical coherence tomography (Conference Presentation)", SPIE BiOS Optical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XX, San Francisco, California, United States, SPIE, 2016.
Zhang, X., J. Mavadia-Shukla, W. Yuan, H-C. Park, X. Li, and H. Xie, "Electro-thermal MEMS fiber scanner for endoscopic optical coherence tomography (Conference Presentation)", SPIE BiOSOptical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XX, vol. 9697, San Francisco, California, United States, SPIE, pp. 96970O, 2016.
Zhang, X., L. Zhou, and H. Xie, "A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives", 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, IEEE, pp. 71 - 74, 01/2016.
Han, F., W. Wang, X. Zhang, and H. Xie, "Miniature Fourier transform spectrometer with a dual closed-loop controlled electrothermal micromirror", Optics Express, vol. 24, issue 20, pp. 22650, Jan-01-2016.
Han, F., W. Wang, X. Zhang, and H. Xie, "Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers", Journal of Microelectromechanical Systems, vol. 4, pp. 750-760, 2016.
Duan, C., W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, "A Self-Aligned 45°-Tilted Two-Axis Scanning Micromirror for Side-View Imaging", Journal of Microelectromechanical Systems, vol. 4, pp. 799-811, 2016.
Torres, D., T. Wang, J. Zhang, X. Zhang, S. Dooley, X. Tan, H. Xie, and N. Sepulveda, "VO₂-Based MEMS Mirrors", Journal of Microelectromechanical Systems, pp. 780-787, 2016.
Zhang, X., L. Zhou, C. Duan, D. Zheng, S. Koppal, Q. Tanguy, and H. Xie, "A wide-angle immersed MEMS mirror and its application in optical coherence tomography", 2016 International Conference on Optical MEMS and Nanophotonics (OMN), Singapore, Singapore, IEEE, 2016.
Zhang, X., S. J. Koppal, R. Zhang, L. Zhou, E. Butler, and H. Xie, "Wide-angle structured light with a scanning MEMS mirror in liquid", Optics Express, vol. 24, issue 4, no. 4, pp. 3479-3487, 02/2016.