Publications

Found 36 results
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Duan, C., W. Wang, X. Zhang, J. Ding, Q. Chen, A. Pozzi, and H. Xie, "A 45°-tilted 2-axis scanning micromirror integrated on a silicon optical bench for 3D endoscopic optical imaging", 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal, IEEE, pp. 948 - 951, 1/2015.
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Wang, H., X. Zhang, D. Zhang, L. Zhou, and H. Xie, "Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
Wang, D., C. Duan, X. Zhang, Z. Yun, A. Pozzi, and H. Xie, "Common-path optical coherence tomography using a microelectromechanical-system-based endoscopic probe", Applied Optics, vol. 55, issue 25, pp. 6930, Jan-01-2016.
Liu, L., E. Wang, X. Zhang, Y. Tang, and H. Xie, "Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans", Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp. 1085-1088, Jan, 2013.
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Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.
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Tseng, V. Farm- Guoo, J. Li, X. Zhang, J. Ding, Q. Chen, and H. Xie, "An electromagnetically actuated micromirror with precise angle control for harsh environment optical switching applications", Sensors and Actuators A: Physical, vol. 206, pp. 1 - 9, 2/2014.
Zhou, L., X. Zhang, and H. Xie, "An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability", Micromachines, vol. 10, issue 5, pp. 323, Jan-05-2019.
Zhang, X., J. Mavadia-Shukla, W. Yuan, H-C. Park, X. Li, and H. Xie, "Electro-thermal MEMS fiber scanner for endoscopic optical coherence tomography (Conference Presentation)", SPIE BiOSOptical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XX, vol. 9697, San Francisco, California, United States, SPIE, pp. 96970O, 2016.
Park, H-C., X. Zhang, J. Mavadia-Shukla, W. Yuan, H. Xie, and X. Li, "Electro-thermal MEMS fiber scanner for endoscopic optical coherence tomography (Conference Presentation)", SPIE BiOS Optical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XX, San Francisco, California, United States, SPIE, 2016.
Zhang, X., L. Liu, W. Liang, X. Li, and H. Xie, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.
Xie, H., X. Zhang, L. Zhou, and S. Pal, "Electrothermally actuated MEMS mirrors", Optical MEMS, Nanophotonics, and Their Applications, 1: CRC Press, pp. 159 - 186, 2017.
Duan, C., X. Zhang, D. Wang, Z. Zhou, P. Liang, A. Pozzi, and H. Xie, "An endoscopic forward-viewing OCT imaging probe based on a two-axis scanning mems mirror", Biomedical Imaging (ISBI), 2014 IEEE 11th International Symposium on, pp. 1397-1400, April, 2014.
Xie, H., S. Koppal, X. Zhang, L. Zhou, and C. Duan, Endoscopic OCT probes with immersed mems mirrors, no. US20190150715A1, 2019.
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Zhang, X., L. Zhou, and H. Xie, "A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph", Micromachines, vol. 6, issue 12, pp. 1876 - 1889, 12/2015.
Zhou, L., Z. Li, M. Liang, Y. Chen, X. Zhang, and H. Xie, "A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage", MOEMS and Miniaturized Systems XVIIIMOEMS and Miniaturized Systems XVIII, San Francisco, United States, SPIE, 2019.
Wang, D., H. Liu, J. Zhang, Q. Chen, W. Wang, X. Zhang, and H. Xie, "Fourier transform infrared spectrometer based on an electrothermal MEMS mirror", Applied Optics, vol. 57, issue 21, pp. 5956, Jan-01-2018.
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Cheng, X., X. Sun, Y. Liu, L. Zhu, X. Zhang, L. Zhou, and H. Xie, "Integrated Optoelectronic Position Sensor for Scanning Micromirrors", Sensors, vol. 18, issue 4, pp. 982, Jan-04-2018.
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Pal, S., S.R. Samuelson, X. Zhang, and H. Xie, "Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 1587-1590, June, 2013.
Zhang, X., L. Zhou, and H. Xie, "A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives", 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, IEEE, pp. 71 - 74, 01/2016.
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Zhang, X., R. Zhang, S. Koppal, L. Butler, X. Cheng, and H. Xie, "MEMS mirrors submerged in liquid for wide-angle scanning", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 847 - 850, 2015.
Liu, L., E. Wang, X. Zhang, W. Liang, X. Li, and H. Xie, "MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan", Sensors and Actuators A: Physical, vol. 215, pp. 89 - 95, 08/2014.
Han, F., W. Wang, X. Zhang, and H. Xie, "Miniature Fourier transform spectrometer with a dual closed-loop controlled electrothermal micromirror", Optics Express, vol. 24, issue 20, pp. 22650, Jan-01-2016.
Zhou, L., X. Zhang, Y. Sung, W-C. Shih, and H. Xie, "A Miniature Lens Scanner with an Electrothermally-Actuated Micro-Stage", 2018 International Conference on Optical MEMS and Nanophotonics (OMN)2018 International Conference on Optical MEMS and Nanophotonics (OMN), Lausanne, Switzerland, IEEE, 2018.
Zhang, H., D. Xu, X. Zhang, Q. Chen, H. Xie, and S. Li, "Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror", Sensors, vol. 15, issue 12, pp. 30991 - 31004, Jan-12-2015.
Han, F., W. Wang, X. Zhang, and H. Xie, "Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers", Journal of Microelectromechanical Systems, vol. 4, pp. 750-760, 2016.