Publications

Found 30 results
Author Title [ Type(Desc)] Year
Filters: Author is Allen, Mark G.  [Clear All Filters]
Book Chapter
Arnold, D. P., and M. G. Allen, "Fabrication of Microscale Rotating Magnetic Machines", Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines, New York, Springer, pp. 157-190, 2009.
Conference Paper
Kim, J., Y-K. Yoon, and M. G. Allen, "Double-side exposure UV-LED CNC lithography for fine 3D microfabrication", 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Los Angeles, CA, USA, IEEE, 2017.
Arnold, D. P., I. Zana, J. Park, S. Das, Y. Joung, D. Veazie, J. H. Lang, and M. G. Allen, "High-speed characterization and mechanical modeling of microscale, axial-flux, permanent-magnet generators", 13th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers 05), vol. 1, Seoul, Korea, pp. 701-704, June, 2005.
Kagan, C. R., D. P. Arnold, M. G. Allen, and R. H. Olsson, "IoT4Ag: MEMS-Enabled Distributed Sensing, Communications, And Information Systems for The Internet Of Things For Precision Agriculture", 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), virtual, IEEE, 2021.
Zana, I., D. P. Arnold, and M. G. Allen, "Large volume, high performance electroplated Co-Pt micromagnets for MEMS applications", Electrochemical Processing in ULSI and MEMS (Electrochem. Soc. Proc. Vol. 2004-17), pp. 404-411, May, 2004.
Peterson, B., W. C. Patterson, F. Herrault, D. P. Arnold, and M. G. Allen, "Laser-micromachined permanent magnet arrays with spatially alternating magnetic field distribution", Tech. Dig. 12th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Apps. (PowerMEMS 2012), Atlanta, GA, IEEE, 12/2012.
Arnold, D. P., S. Das, F. Cros, I. Zana, J. H. Lang, and M. G. Allen, "Magnetic induction machines embedded in fusion-bonded silicon", Tech. Dig. Solid-State Sensor, Actuator, and MicrosystemsWorkshop (Hilton Head 2004), pp. 129-132, June, 2004.
Zana, I., F. Herrault, D. P. Arnold, and M. G. Allen, "Magnetic patterning of permanent-magnet rotors for microscale motor/generators", Tech. Dig. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 116-119, November, 2005.
Arnold, D. P., F. Cros, T. Glover, M. G. Allen, K. Hillman, and D. Veazie, "Materials and fabrication methods for high-temperature micro-magnetic machines for micro-turbine power generation", Proc. Army Research Lab Collaborative Technology Alliances Conf., Power and Energy, College Park, MD, pp. 77-81, April, 2003.
Cros, F., D. P. Arnold, M. G. Allen, S. Das, H. Koser, and J. H. Lang, "Micro-magnetic induction machines for portable power applications", Proc. Army Research Lab Collaborative Technology Alliances Conf., Power and Energy, College Park, MD, pp. 17-21, April, 2003.
Das, S., D. P. Arnold, I. Zana, J. Park, J. H. Lang, and M. G. Allen, "Multi-watt electric power from a microfabricated permanent-magnet generator", Tech. Dig. 18th IEEE Int. Conf. MicroElectro Mechanical Systems (MEMS 2005), Miami Beach, FL, pp. 287-290, January, 2005.
Arnold, D. P., I. Zana, F. Herrault, P. Galle, J. Park, S. Das, J. H. Lang, and M. G. Allen, "Optimization of a microscale, axial-flux, permanent-magnet generator", Tech. Dig. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 165-168, November, 2005.
Jacobson, S., S. Das, N. Savoulides, J. Steyn, J. H. Lang, H. Li, C. Livermore, M. Schmidt, C. Teo, S. Umans, et al., "Progress toward a microfabricated gas turbine generator for soldier portable power applications", Proc. 24th Army Science Conf., Orlando, FL, November, 2004.
Arnold, D. P., F. Cros, I. Zana, M. G. Allen, S. Das, and J. H. Lang, "Second-generation, silicon-based magnetic induction machines for microengine power generation", Army Research Lab Collaborative Technology Alliances Conf., Power and Energy, Washington, DC, May, 2004.
Arnold, D. P., P. Galle, F. Herrault, S. Das, J. H. Lang, and M. G. Allen, "A self-contained, flow-powered microgenerator system", Tech. Dig. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 113-115, November, 2005.
Journal Article
Arnold, D. P., I. Zana, and M. G. Allen, "Analysis and optimization of vertically oriented, throughwafer, laminated magnetic cores in silicon", J. Micromech. Microeng, vol. 15, no. 5, pp. 971-977, MAY, 2005.
Kim, J., M. G. Allen, and Y.K. Yoon, "Computer-controlled dynamic mode multidirectional UV lithography for 3D microfabrication", Journal of Micromechanics and Microengineering, vol. 21 (3), 2011.
Arnold, D. P., F. Herrault, I. Zana, P. Galle, J. Park, S. Das, J. H. Lang, and M. G. Allen, "Design optimization of an 8-Watt, microscale, axial-flux, permanent-magnet generator", J. Micromech. Microeng., vol. 16, no. 9, pp. s290-s296, SEP, 2006.
Choi, S-O., Y. Chun Kim, J-H. Park, J. Hutcheson, H. S. Gill, Y.K. Yoon, M. R. Prausnitz, and M. G. Allen, "An electrically active mironeedle array for electroporation", Biomedical Microdevices, vol. 12, no. 2, 2010.
Arnold, D. P., F. Cros, I. Zana, D. Veazie, and M. G. Allen, "Electroplated metal microstructures embedded in fusion-bonded silicon: conductors and magnetic materials", J. Microelectromech. Syst., vol. 13, no. 5, pp. 791-798, OCT, 2004.
Herrault, F., D. P. Arnold, I. Zana, P. Galle, and M. G. Allen, "High temperature operation of multi-watt, axial-flux, permanent-magnet microgenerators", Sensors & Actuators A, vol. 148, pp. 299-305, NOV, 2008.
Wu, X., G. Yuan, Y.K. Yoon, and M. G. Allen, "Kinematically Stabilized Microbubble Actuator Arrays", Journal of Microelectromechanical Systems, vol. 17, issue 1, pp. 124 - 132, 02/2008.
Arnold, D. P., S. Das, F. Cros, I. Zana, J. H. Lang, and M. G. Allen, "Magnetic induction machines integrated into bulk-micromachined silicon", J. Microelectromech. Syst., vol. 15, no. 2, pp. 406-414, APR, 2006.
Arnold, D. P., S. Das, J. Park, I. Zana, J. H. Lang, and M. G. Allen, "Microfabricated high-speed axial-flux multiwatt permanent-magnet generators - Part II: design, fabrication, and testing", J. Microelectromech. Syst., vol. 15, no. 5, pp. 1351-1363, OCT, 2006.
Das, S., D. P. Arnold, I. Zana, J. Park, M. G. Allen, and J. H. Lang, "Microfabricated high-speed axial-flux multiwatt permanent-magnet generators - Part I: modeling", J. Microelectromech. Syst., vol. 15, no. 5, pp. 1330-1350, OCT, 2006.