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Hao Zhang
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2013
Chen, Q.
,
H. Zhang
,
X. Zhang
,
D. Xu
, and
H. Xie
,
"
Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs
"
,
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
, pp. 817-820, April, 2013.