Publications

Found 27 results
Author Title [ Type(Desc)] Year
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Conference Paper
Jia, K., S. Pal, and H. Xie, "An Agile Tip-Tilt-Piston Micromirror With Large Aperture, Large Scanning Range and Low Driving Voltage", Hilton Head 2008, Technical Digest pp. 284-287, 2008.
Pal, S., and H. Xie, "Analysis and Simulation of Curved Bimorph Microactuators", Microtech Conference and Expo (Nanotech 2010 vol. 2), Anaheim, CA, NSTI, 2010.
Pal, S., and H. Xie, "Analysis, simulation and fabrication of curved multimorphs that undergo bending and twisting", Sensors, 2011 IEEE, pp. 667-670, Oct, 2011.
Jia, K., S. Pal, L. Wu, D. Hamilton, and H. Xie, "Dental optical coherence tomography employing miniaturized MEMS-based imaging probe", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, pp. 1 -2, 2009.
Pal, S., and H. Xie, "Design and Fabrication of 2D Fast Electrothermal Micromirrors with Large Scan Range and Small Center Shift", Transducers'11, The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Beijing, 06/2011.
Pal, S., and H. Xie, "Dynamic Compact Thermal Model of an Electrothermal Micromirror Based on Transmission Line Theory", Microtech Conference and Expo (Nanotech 2010 vol. 2), Anaheim, CA, NSTI, 2010.
Pal, S., K. Jia, and H. Xie, "An Electrothermal Micromirror with High Linear Scanning Efficiency", LEOS 2007, Lake Buena Vista, FL, October, 2007.
Jia, K., S. Pal, and H. Xie, "High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, Clearwater Beach, FL, pp. 67 -68, 08/2009.
Pal, S., S.R. Samuelson, X. Zhang, and H. Xie, "Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 1587-1590, June, 2013.
Feng, X., A. Jain, S. Pal, L. Xiao, T. Nishida, and H. Xie, "LVD micromirror for rapid reference scanning in optical coherence tomography", MEMS/MOEMS Components and Their Applications IV, vol. 6464, no. 1: SPIE, pp. 64640M, 02/2007.
Feng, X., A. Jain, S. Pal, T. Nishida, and H. Xie, "LVD Micromirror for Rapid Reference Scanning in Optical Coherence Tomography", Proceedings of the Photonics West, Paper 6464-22, San Jose, CA, January, 2007.
Pal, S., and H. Xie, "Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, Clearwater Beach, FL, pp. 55 -56, 08/2010, 2009.
Liu, L., S. Pal, and H. Xie, "MEMS Mirrors Based on Curved Concentric Electrothermal Actuators with Very Small Lateral Shift and Tilt", Transducers'11, The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Beijing, 06/2011.
Pal, S., S. Samuelson, and H. Xie, "Novel mechanisms for millimeter range piston actuation of vertical micromirrors and microlenses", International Conference on Optical MEMS and Nanophotonics, Banff, Alberta, Canada, 2012.
Ghosh, A., and S. Pal, "Optimal actuation of a MEMS cantilever by a laser beam", SPIE Optics East, Paper 6374A-20, Boston, MA, October, 2006.
Pal, S., K. Jia, S. Maley, and H. Xie, "Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device", MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, vol. 6885, San Jose, CA, USA, SPIE, pp. 68850B - 68850B-11, 01/2008.
Pal, S., and H. Xie, "Repeatability study of an electrothermally actuated micromirror", Reliability Physics Symposium, 2009 IEEE International, Montreal, QC, pp. 549 -556, 2009.
Journal Article
Pal, S., and H. Xie, "Analysis and Fabrication of Curved Multimorph Transducers that Undergo Bending and Twisting", IEEE/ASME Journal of Microelectromechanical Systems (accepted, In Press), 2012.
Pal, S., and H. Xie, "A Curved Multimorph Based Electrothermal Micromirror with Large Scan Range and Low Drive Voltage", Sensors & Actuators: A. Physical, vol. 170, pp. pp. 156-163, 2011.
Pal, S., and H. Xie, "Distributed and lumped element models for a bimorph-actuated micromirror", Journal of Micromechanics and Microengineering, vol. 20, no. 4, pp. 045020, 2010.
Jia, K., S. Pal, and H. Xie, "An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs", Microelectromechanical Systems, Journal of, vol. 18, no. 5, pp. 1004 -1015, 2009.
Pal, S., and H. Xie, "Fabrication of robust electrothermal MEMS devices using aluminum–tungsten bimorphs and polyimide thermal isolation", Journal of Micromechanics and Microengineering, vol. 22, issue 11, pp. 115036, 11/2012.
Liu, L., S. Pal, and H. Xie, "MEMS mirrors based on a curved concentric electrothermal actuator", Sensors and Actuators A: Physical, 3/2012.
Liu, L., S. Pal, and H. Xie, "MEMS mirrors based on a curved concentric electrothermal actuator", Sensors and Actuators A: Physical (In Press), 2012.
Pal, S., and A. Ghosh, "Optimal actuation of micro-cantilevers by laser radiation pressure", IEE Electronics Letters, vol. 42, no. 10, pp. 580-581, MAY, 2006.