Publications

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Cheng, X., H. Lu, Z. Lou, H. Xie, W. Wang, and M. Zheng, "An integrated optoelectronic position sensor for MEMS scanning mirrors", 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, IEEE, 2017.
Cheng, X., X. Sun, Y. Liu, L. Zhu, X. Zhang, L. Zhou, and H. Xie, "Integrated Optoelectronic Position Sensor for Scanning Micromirrors", Sensors, vol. 18, issue 4, pp. 982, Jan-04-2018.
Liu, Y., Y. Feng, X. Sun, L. Zhu, X. Cheng, Q. Chen, Y. Liu, and H. Xie, "Integrated tilt angle sensing for large displacement scanning MEMS mirrors", Optics Express, vol. 26, issue 20, pp. 25736, Jan-01-2018.
M
Zhang, X., R. Zhang, S. Koppal, L. Butler, X. Cheng, and H. Xie, "MEMS mirrors submerged in liquid for wide-angle scanning", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 847 - 850, 2015.