Publications

Found 10 results
Author Title [ Type(Asc)] Year
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Journal Article
Tseng, V. F. G., and H. Xie, "Simultaneous piston position and tilt angle sensing for large vertical displacement micromirrors by frequency detection inductive sensing", Applied Physics Letters, vol. 107, issue 21, pp. 214102, 11/2015.
Tseng, V. Farm- Guoo, and H. Xie, "Resonant Inductive Coupling-Based Piston Position Sensing Mechanism for Large Vertical Displacement Micromirrors", Journal of Microelectromechanical Systems, vol. 25, issue 1, no. 1, pp. 207 - 216, 2/2016.
Tseng, V. Farm- Guoo, and H. Xie, "Resonant Inductive Coupling-Based Piston Position Sensing Mechanism for Large Vertical Displacement Micromirrors", Journal of Microelectromechanical Systems, pp. 1 - 10, 11/2015.
Tseng, V. Farm- Guoo, and H. Xie, "Increased Multilayer Fabrication and RF Characterization of a High-Density Stacked MIM Capacitor Based on Selective Etching", IEEE Transactions on Electron Devices, vol. 61, issue 7, pp. 2302 - 2308, 7/2014.
Li, J., V. Farm- Guoo Tseng, Z. Xiao, and H. Xie, "A High-Q In-Silicon Power Inductor Designed for Wafer-Level Integration of Compact DC–DC Converters", IEEE Transactions on Power Electronics, vol. 32, issue 5, pp. 3858 - 3867, Jul-07-2016, 2017.
Li, J., V. Tseng, Z. Xiao, and H. Xie, "A High-Q In-Silicon Power Inductor Designed for Wafer-Level Integration of Compact DC-DC Converters", IEEE Transactions on Power Electronics, pp. 1 - 1, 2016.
Tseng, V. Farm- Guoo, J. Li, X. Zhang, J. Ding, Q. Chen, and H. Xie, "An electromagnetically actuated micromirror with precise angle control for harsh environment optical switching applications", Sensors and Actuators A: Physical, vol. 206, pp. 1 - 9, 2/2014.
Tseng, V. F. G., and H. Xie, "Design and fabrication of a high-density multilayer metal–insulator–metal capacitor based on selective etching", Journal of Micromechanics and Microengineering, vol. 23, issue 3, pp. 035025, 03/2013.
Conference Paper
Tseng, V. Farm- Guoo, L. Wu, and H. Xie, "Inductive eddy current sensing as a displacement sensing mechanism for large piston/rotation micromirrors", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 176 - 179, 6/2015.
Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.