Publications

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Tseng, V. Farm- Guoo, J. Li, X. Zhang, J. Ding, Q. Chen, and H. Xie, "An electromagnetically actuated micromirror with precise angle control for harsh environment optical switching applications", Sensors and Actuators A: Physical, vol. 206, pp. 1 - 9, 2/2014.
Tseng, V. Farm- Guoo, and H. Xie, "Resonant Inductive Coupling-Based Piston Position Sensing Mechanism for Large Vertical Displacement Micromirrors", Journal of Microelectromechanical Systems, pp. 1 - 10, 11/2015.
Tseng, V. F. G., and H. Xie, "Design and fabrication of a high-density multilayer metal–insulator–metal capacitor based on selective etching", Journal of Micromechanics and Microengineering, vol. 23, issue 3, pp. 035025, 03/2013.
Tseng, V. Farm- Guoo, and H. Xie, "Resonant Inductive Coupling-Based Piston Position Sensing Mechanism for Large Vertical Displacement Micromirrors", Journal of Microelectromechanical Systems, vol. 25, issue 1, no. 1, pp. 207 - 216, 2/2016.
Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.
Tseng, V. Farm- Guoo, L. Wu, and H. Xie, "Inductive eddy current sensing as a displacement sensing mechanism for large piston/rotation micromirrors", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 176 - 179, 6/2015.
Tseng, V. Farm- Guoo, and H. Xie, "Increased Multilayer Fabrication and RF Characterization of a High-Density Stacked MIM Capacitor Based on Selective Etching", IEEE Transactions on Electron Devices, vol. 61, issue 7, pp. 2302 - 2308, 7/2014.
Tseng, V. F. G., and H. Xie, "Simultaneous piston position and tilt angle sensing for large vertical displacement micromirrors by frequency detection inductive sensing", Applied Physics Letters, vol. 107, issue 21, pp. 214102, 11/2015.