Publications

Found 4 results
Author Title [ Type(Desc)] Year
Filters: Author is Chen, Zhenfang  [Clear All Filters]
Conference Paper
Wang, H., Y. Yu, Z. Chen, H. Yang, H. Jiang, and H. Xie, "Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT", IEEE Sensors, New Delhi, India, IEEE, 2018.
Wang, H., M. Li, Y. Yu, Z. Chen, Y. Ding, H. Jiang, and H. Xie, "A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT", 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, IEEE, 2019.
Journal Article
Wang, H., Z. Chen, and H. Xie, "A High-SPL Piezoelectric MEMS Loud Speaker based on Thin Ceramic PZT", Sensors and Actuators A: Physical, pp. 112018, Jan-05-2020.
Wang, H., M. Godara, Z. Chen, and H. Xie, "A One-step Residue-free Wet Etching Process of Ceramic PZT for Piezoelectric Transducers", Sensors and Actuators A: Physical, Jan-03-2019.