Publications

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Wang, H., X. Zhang, D. Zhang, L. Zhou, and H. Xie, "Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
Wang, H., M. Li, Y. Yu, Z. Chen, Y. Ding, H. Jiang, and H. Xie, "A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT", 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, IEEE, 2019.
Wang, H., M. Godara, Z. Chen, and H. Xie, "A One-step Residue-free Wet Etching Process of Ceramic PZT for Piezoelectric Transducers", Sensors and Actuators A: Physical, Jan-03-2019.
Wang, H., Y. Ma, H. Yang, H. Jiang, Y. Ding, and H. Xie, "MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications", Micromachines, vol. 11, issue 10, pp. 928, Jan-10-2020.
Wang, H., Y. Yu, Z. Chen, H. Yang, H. Jiang, and H. Xie, "Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT", IEEE Sensors, New Delhi, India, IEEE, 2018.
Wang, H., Z. Chen, H. Yang, H. Jiang, and H. Xie, "A Ceramic PZT-based pMUT Array for Endoscopic Photoacoustic Imaging", Journal of Microelectromechanical Systems, 2020.
Wang, H., L. Zhou, X. Zhang, and H. Xie, "Thermal Reliability Study of an Electrothermal MEMS Mirror", IEEE Transactions on Device and Materials Reliability, pp. 1 - 1, Jan-01-2018.
Wang, H., Z. Chen, and H. Xie, "A High-SPL Piezoelectric MEMS Loud Speaker based on Thin Ceramic PZT", Sensors and Actuators A: Physical, pp. 112018, Jan-05-2020.