Publications

Found 2 results
Author Title [ Type(Desc)] Year
Filters: Author is Liang, Mengyue  [Clear All Filters]
Conference Paper
Zhou, L., Z. Li, M. Liang, Y. Chen, X. Zhang, and H. Xie, "A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage", MOEMS and Miniaturized Systems XVIIIMOEMS and Miniaturized Systems XVIII, San Francisco, United States, SPIE, 2019.
Wang, D., X. Zhang, L. Zhou, M. Liang, D. Zhang, and H. Xie, "An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.