Surface Adsorption and Air Damping Behavior of β‐Ga2O3 Nanomechanical Resonators

TitleSurface Adsorption and Air Damping Behavior of β‐Ga2O3 Nanomechanical Resonators
Publication TypeJournal Article
Year of Publication2024
AuthorsSui, W., S. M. Enamul H. Yousuf, Y. Liu, S. J. Pearton, and P. X. ‐L. Feng
JournalAdvanced Materials Technologies
Volume9
Issue5
Date PublishedJan-03-2024
ISSN2365-709X
URLhttps://onlinelibrary.wiley.com/toc/2365709x/9/5https://onlinelibrary.wiley.com/doi/10.1002/admt.202301356https://onlinelibrary.wiley.com/doi/pdf/10.1002/admt.202301356https://onlinelibrary.wiley.com/doi/am-pdf/10.1002/admt.202301356
DOI10.1002/admt.v9.510.1002/admt.202301356
Short TitleAdv Materials Technologies