| Title | High Quality Factors in Superlattice Ferroelectric Hf 0.5 Zr 0.5 O 2 Nanoelectromechanical Resonators |
| Publication Type | Journal Article |
| Year of Publication | 2022 |
| Authors | Zheng, X-Q., T. Tharpe, S. M. Enamul H. Yousuf, N. G. Rudawski, P. X. - L. Feng, and R. Tabrizian |
| Journal | ACS Applied Materials & Interfaces |
| Volume | 14 |
| Issue | 32 |
| Pagination | 36807 - 36814 |
| Date Published | May-08-2023 |
| ISSN | 1944-8244 |
| URL | https://pubs.acs.org/doi/10.1021/acsami.2c08414https://pubs.acs.org/doi/pdf/10.1021/acsami.2c08414https://pubs.acs.org/doi/pdf/10.1021/acsami.2c08414 |
| DOI | 10.1021/acsami.2c08414 |
| Short Title | ACS Appl. Mater. Interfaces |
