A 124° rotation angle electrothermal micromirror with integrated platinum heater

TitleA 124° rotation angle electrothermal micromirror with integrated platinum heater
Publication TypeJournal Article
Year of Publication2007
AuthorsWu, L., and H. Xie
JournalIEEE Journal of Selected Topics in Quantum Electronics
Volume13
Issue2
Pagination316 - 321
Date Published3/2007
ISSN1077-260X
DOI10.1109/JSTQE.2007.894066
Short TitleIEEE J. Select. Topics Quantum Electron.