IMG Publications

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D. P. Arnold, S. Bhardwaj, S. Gururaj, T. Nishida, and M. Sheplak, "A Piezoresistive Microphone for Aeroacoustic Measurements", Proc. of ASME IMECE 2001, International Mechanical Engineering Congress and Exposition, Paper MEMS-23841, vol. 2, New York, NY, November, 2001.
D. P. Arnold, T. Nishida, L. Cattafesta, and M. Sheplak, "MEMS-Based Acoustic Array Technology", 40th Aerospace Sciences Meeting and Exhibit, AIAA Paper 2002-0253, Reno, NV, January, 2002.
D. P. Arnold, T. Nishida, L. Cattafesta, and M. Sheplak, "Technology Development for Directional Acoustic Arrays", 142nd Meeting of the Acoustical Society of America, Ft. Lauderdale, FL, DEC, 2001.
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S. Bhardwaj, M. Sheplak, and T. Nishida, "S/N Optimization and Noise Considerations for Piezoresistive Microphones", 16th International Conference on Noise in Physical Systems and 1/f Fluctuations, Gainesville, FL, World Scientific, pp. 549-552, October, 2001.
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V. Chandrasekaran, B. V. Sankar, L. Cattafesta, T. Nishida, and M. Sheplak, "An Analytical Model for Thermoelastic Actuation of Composite Diaphragms", 12th International Conference on Solid-State Sensors and Actuators, Boston, MA, pp. 1844-1847, June, 2003.
V. Chandrasekaran, X. Li, T. Nishida, L. Cattafesta, J. Li, and M. Sheplak, "Thermoelastically Actuated MEMS Ultrasonic Transducer", 142nd Meeting of the Acoustical Society of America, Ft. Lauderdale, FL, DEC, 2001.
V. Chandrasekaran, A. Cain, T. Nishida, and M. Sheplak, "Dynamic Calibration Technique for Thermal Shear Stress Sensors with Variable Mean Flow", 38th AIAA Aerospace Sciences Meeting & Exhibit, AIAA Paper 2000-0508, Reno, NV, January, 2000.
V. Chandrasekaran, A. Cain, T. Nishida, L. Cattafesta, and M. Sheplak, "Characterization of a Micromachined Thermal Shear Stress Sensor", 39th AIAA Aerospace Sciences Meeting & Exhibit, AIAA Paper 2001-0247, Reno, NV, January, 2001.
V. Chandrasekaran, E. Chow, T. Kenny, T. Nishida, and M. Sheplak, "Through Wafer Electrical Interconnects for MEMS Sensors", Proceedings of ASME IMECE 2001, International Mechanical Engineering Congress and Exposition, Paper MEMS-23846, vol. 2, New York, NY, November, 2001.
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X. Feng, A. Jain, S. Pal, L. Xiao, T. Nishida, and H. Xie, "LVD micromirror for rapid reference scanning in optical coherence tomography", MEMS/MOEMS Components and Their Applications IV, vol. 6464, no. 1: SPIE, pp. 64640M, 02/2007.
X. Feng, A. Jain, S. Pal, T. Nishida, and H. Xie, "LVD Micromirror for Rapid Reference Scanning in Optical Coherence Tomography", Proceedings of the Photonics West, Paper 6464-22, San Jose, CA, January, 2007.
E. Filangeri, and T. Nishida, "Depth profile of thermal donor in boron-doped Czochralski-grown silicon", Journal of Applied Physics, vol. 75, pp. 7931-7934, JUN, 1994.
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S. Horowitz, T-A. Chen, L. Cattafesta, M. Sheplak, T. Nishida, and V. Chandrasekaran, "Optical Flow Sensor Using Geometric Moire Interferometry", 34th International Conference on Environmental Systems, SAE Paper 2004-01-2267, Colorado Springs, CO, July, 2004.
S. Horowitz, T-A. Chen, V. Chandrasekaran, K. Tedjojuwono, T. Nishida, L. Cattafesta, and M. Sheplak, "A Wafer-Bonded, Floating Element Shear-Stress Sensor", Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head, SC, pp. 13-18, June, 2004.
S. Horowitz, T. Nishida, L. Cattafesta, and M. Sheplak, "Characterization of Compliant-Backplate Helmholtz Resonators for an Electromechanical Acoustic Liner", 40th AIAA Aerospace Sciences Meeting & Exhibit, AIAA Paper 2002-0666, Reno, NV, January, 2002.
S. Horowitz, T. Nishida, L. Cattafesta, and M. Sheplak, "Design and Characterization of a Micromachined Piezoelectric Microphone", 11th AIAA/CEAS Aeroacoustics Conference, AIAA Paper 2005-2998, May, 2005.
S. Horowitz, M. Sheplak, L. Cattafesta, and T. Nishida, "A MEMS Acoustic Energy Harvester", J. Micromech. Microeng., vol. 16, pp. S174-S181, SEP, 2006. Abstract
S. Horowitz, T. Nishida, L. Cattafesta, and M. Sheplak, "Compliant-Backplate Helmholtz Resonators for Active Noise Control Applications", 39th AIAA Aerospace Sciences Meeting & Exhibit, AIAA Paper 2001-0817, Reno, NV, January, 2001.
S. Horowitz, M. Sheplak, L. Cattafesta, and T. Nishida, "MEMS Acoustic Energy Harvester", 5th International Workshop on Micro Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2005), Tokyo, Japan, November, 2005.
S. Horowitz, A K. V.S., F. Liu, D. Johnson, T. Nishida, K. Ngo, M. Sheplak, and L. Cattafesta, "Technology Development for Self-Powered Sensors", 1st AIAA Flow Control Conference, AIAA Paper 2002-2702, St. Louis, MO, June, 2002.
S. Horowitz, T. Nishida, L. Cattafesta, and M. Sheplak, "Impedance tuning of an electromechanical acoustic liner", presentation at the 142nd Meeting of the Acoustic Society of America, The Journal of the Acoustical Society of America, vol. 110, no. 5, pp. 2773, NOV, 2001.
S. Horowitz, T. Nishida, L. Cattafesta, and M. Sheplak, "A Micromachined Piezoelectric Microphone for Aeroacoustics Applications", Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head, SC, June, 2006.
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