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Toshikazu Nishida
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A
D. P. Arnold
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
A directional acoustic array using silicon micromachined piezoresistive microphones
",
J. Acous. Soc. Amer.
, vol. 113, no. 1, pp. 289-298, JAN, 2003.
Abstract
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D. P. Arnold
,
S. Bhardwaj
,
S. Gururaj
,
T. Nishida
, and
M. Sheplak
,
"
A Piezoresistive Microphone for Aeroacoustic Measurements
",
Proc. of ASME IMECE 2001, International Mechanical Engineering Congress and Exposition, Paper MEMS-23841
, vol. 2, New York, NY, November, 2001.
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D. P. Arnold
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
MEMS-Based Acoustic Array Technology
",
40th Aerospace Sciences Meeting and Exhibit, AIAA Paper 2002-0253
, Reno, NV, January, 2002.
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D. P. Arnold
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
Technology Development for Directional Acoustic Arrays
",
142nd Meeting of the Acoustical Society of America
, Ft. Lauderdale, FL, DEC, 2001.
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B
R. Bashirullah
,
J. Harris
,
J. Sanchez
,
T. Nishida
, and
J. Principe
,
"
Florida Wireless Implantable Recording Electrodes (FWIRE) for Brain Machine Interfaces
",
IEEE International Symposium on Circuits and Systems (ISCAS 2007)
, 2084 , June, 2007.
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M. Baykan
,
S. E. Thompson
, and
T. Nishida
,
"
Strain effects on three-dimensional, two-dimensional, and one-dimensional silicon logic devices: Predicting the future of strained silicon
",
Journal of Applied Physics
, vol. 108, no. 9, pp. 093716-24, 11/2010.
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S. Bhardwaj
,
M. Sheplak
, and
T. Nishida
,
"
S/N Optimization and Noise Considerations for Piezoresistive Microphones
",
16th International Conference on Noise in Physical Systems and 1/f Fluctuations
, Gainesville, FL, World Scientific, pp. 549-552, October, 2001.
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C
V. Chandrasekaran
,
A. Cain
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
Characterization of a Micromachined Thermal Shear Stress Sensor
",
39th AIAA Aerospace Sciences Meeting & Exhibit, AIAA Paper 2001-0247
, Reno, NV, January, 2001.
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V. Chandrasekaran
,
E. Chow
,
T. Kenny
,
T. Nishida
, and
M. Sheplak
,
"
Through Wafer Electrical Interconnects for MEMS Sensors
",
Proceedings of ASME IMECE 2001, International Mechanical Engineering Congress and Exposition, Paper MEMS-23846
, vol. 2, New York, NY, November, 2001.
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V. Chandrasekaran
,
E. Chow
,
T. Kenny
,
T. Nishida
,
L. Cattafesta
,
B. Sankar
, and
M. Sheplak
,
"
Thermoelastically Actuated Acoustic Proximity Sensor with Integrated Through-Wafer Interconnects
",
Solid-State Sensor and Actuator Workshop
, Hilton Head, SC, pp. 102-107, June, 2002.
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V. Chandrasekaran
,
X. Li
,
T. Nishida
,
L. Cattafesta
,
J. Li
, and
M. Sheplak
,
"
Thermoelastically Actuated MEMS Ultrasonic Transducer
",
142nd Meeting of the Acoustical Society of America
, Ft. Lauderdale, FL, DEC, 2001.
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V. Chandrasekaran
,
A. Cain
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
Dynamic calibration technique for thermal shear-stress sensors
",
Experiments in Fluids
, vol. 38, pp. 56-65, JUL, 2005.
Abstract
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V. Chandrasekaran
,
A. Cain
,
T. Nishida
, and
M. Sheplak
,
"
Dynamic Calibration Technique for Thermal Shear Stress Sensors with Variable Mean Flow
",
38th AIAA Aerospace Sciences Meeting & Exhibit, AIAA Paper 2000-0508
, Reno, NV, January, 2000.
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V. Chandrasekaran
,
B. Sankar
,
L. Cattafesta
,
T. Nishida
, and
M. Sheplak
,
"
An Analytical Model for Thermoelastic Actuation of Composite Diaphragms
",
12th International Conference on Solid-State Sensors and Actuators
, Boston, MA, pp. 1844-1847, June, 2003.
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Y. Choi
,
J-S. Lim
,
T. Numata
,
T. Nishida
,
T. Nishida
, and
S. Thompson
,
"
Mechanical stress altered electron gate tunneling current and extraction of conduction band deformation potentials for germanium
",
Journal of Applied Physics
, vol. 102, pp. 104507-1–104507-5, DEC, 2007.
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Y. Choi
,
T. Nishida
, and
S. Thompson
,
"
Impact of mechanical stress on direct and trap-assisted gate leakage currents in p-type silicon metal-oxide-semiconductor capacitors
",
Appl. Phys. Lett.
, vol. 92, pp. 173507-1–173507-3, APR, 2008.
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Y. Choi
,
H. W. Park
,
T. Nishida
, and
S. Thompson
,
"
Reliability of HfSiON gate dielectric silicon MOS devices under [110] mechanical stress: Time dependent dielectric breakdown
",
J. Appl. Phys.
, vol. 105, pp. 044503-1–044503-5, FEB, 2009.
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Y. Choi
,
T. Numata
,
T. Nishida
,
R. Harris
, and
S. Thompson
,
"
Impact of mechanical stress on gate tunneling currents of germanium and silicon p-type metal-oxide-semiconductor field-effect transistors and metal gate work function
",
J. Appl. Phys.
, vol. 103, pp. 064510-1–065410-5, MAR, 2008.
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E. Chow
,
A. Partridge
,
V. Chandrasekaran
,
M. Sheplak
,
T. Nishida
,
C. Quate
, and
T. Kenny
,
"
Process Compatible Polysilicon-Based Electrical Through-Wafer Interconnects In Silicon Substrates
",
J. Microelectromechanical Systems
, vol. 11, no. 6, pp. 631-640, JUL, 2002.
Abstract
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M. Chu
,
T. Nishida
,
X. Lu
,
N. Mohta
, and
S. Thompson
,
"
Comparison between high-field piezoresistive coefficients of Si metal-oxide-semiconductor field-effect transistors and bulk Si under uniaxial and biaxial stress
",
J. Appl. Phys.
, vol. 103, pp. 113704-1–113704-7, JUN, 2008.
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M. Chu
,
A. D. Koehler
,
A. Gupta
,
T. Nishida
, and
S. E. Thompson
,
"
Simulation of AlGaN/GaN high-electron-mobility transistor gauge factor based on two-dimnensional electron gas density and electron mobility
",
J. Appl. Phys.
, vol. 108, pp. 6, 11/2010.
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D
R. Dieme
,
G. Bosman
,
M. Sheplak
, and
T. Nishida
,
"
Sources of Excess Noise in Silicon Piezoresistive Microphones
",
148th Meeting Acoustical Society of America, San Diego, CA
, NOV, 2004.
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R. Dieme
,
J. Zhang
,
N. G. Rudawski
,
K. Jones
,
G. Bosman
,
M. Sheplak
, and
T. Nishida
,
"
Process Dependence of 1/f Noise and Defects in Ion Implanted p-Type Piezoresistors
",
Journal of Applied Physics
, vol. 112, 2012.
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R. Dieme
,
G. Bosman
,
M. Sheplak
, and
T. Nishida
,
"
Source of Excess Noise in Silicon Piezoresistive Microphones
",
J. Acoustical Society of America
, vol. 119, pp. 2710-2720, MAY, 2006.
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F
X. Feng
,
A. Jain
,
S. Pal
,
L. Xiao
,
T. Nishida
, and
H. Xie
,
"
LVD micromirror for rapid reference scanning in optical coherence tomography
",
MEMS/MOEMS Components and Their Applications IV
, vol. 6464, no. 1: SPIE, pp. 64640M, 02/2007.
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X. Feng
,
A. Jain
,
S. Pal
,
T. Nishida
, and
H. Xie
,
"
LVD Micromirror for Rapid Reference Scanning in Optical Coherence Tomography
",
Proceedings of the Photonics West, Paper 6464-22
, San Jose, CA, January, 2007.
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E. Filangeri
, and
T. Nishida
,
"
Depth profile of thermal donor in boron-doped Czochralski-grown silicon
",
Journal of Applied Physics
, vol. 75, pp. 7931-7934, JUN, 1994.
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E. Filangeri
, and
T. Nishida
,
"
Hydrogenation of boron in silicon during low temperature gas and liquid phase processing
",
Journal of Applied Physics
, vol. 76, pp. 332-335, JUL, 1994.
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G
Q. Gallas
,
R. Holman
,
T. Nishida
,
B. Carroll
,
M. Sheplak
, and
L. Cattafesta
,
"
Lumped Element Modeling of Piezoelectric-Driven Synthetic Jet Actuators
",
AIAA Journal
, vol. 41, issue 2, no. 2, pp. 240-247, MAR, 2003.
Abstract
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Q. Gallas
,
J. Mathew
,
A K. V.S.
,
R. Holman
,
T. Nishida
,
B. Carroll
,
M. Sheplak
, and
L. Cattafesta
,
"
Lumped Element Modeling of Piezoelectric-Driven Synthetic Jet Actuators
",
40th AIAA Aerospace Sciences Meeting & Exhibit, AIAA Paper 2002-0125
, Reno, NV, January, 2002.
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P. Gu
,
K. Liu
,
H. Chen
,
T. Nishida
, and
H. Z. Fan
,
"
Chemical-Assisted Bonding of Thermoplastics/Elastomer for Fabricating Microfluidic Valves
",
Analytical Chemistry
, vol. 83, issue 1, pp. 446 - 452, 01/2011.
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H
K. Han
, and
T. Nishida
,
"
Sequential substrate and channel hot electron injection to separate oxide and interface traps in n-MOST
",
Solid-State Electronics
, vol. 38, pp. 105-113, JAN, 1995.
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B. Homeijer
,
L. Cattafesta
,
T. Nishida
, and
M. Sheplak
,
"
Design of a MEMS Piezoresistive Microphone for use in Aeroacoustic Measurements
",
13th AIAA/CEAS Aeroacoustics Conference and Exhibit
, Rome, Italy, May, 2007.
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B. Homeijer
,
B. A. Griffin
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
Design and Optimization of a MEMS Piezoresistive Microphone for use in Aeroacoustic Measurements
",
presentation at the 4th Joint Meeting of the ASA and ASJ
, Honolulu, HI, DEC, 2006.
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S. Horowitz
,
T-A. Chen
,
V. Chandrasekaran
,
K. Tedjojuwono
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
A Micromachined Geometric Moire Interferometric Floating-Element Shear Stress Sensor
",
42nd Aerospace Sciences Meeting and Exhibit, AIAA Paper 2004-1042
, Reno, NV, January, 2004.
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S. Horowitz
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
A Micromachined Piezoelectric Microphone for Aeroacoustics Applications
",
Solid-State Sensor, Actuator and Microsystems Workshop
, Hilton Head, SC, June, 2006.
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S. Horowitz
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
Characterization of Compliant-Backplate Helmholtz Resonators for an Electromechanical Acoustic Liner
",
International Journal of Aeroacoustics
, vol. 1, no. 2, pp. 183-205, APR, 2002.
Abstract
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S. Horowitz
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
Compliant-Backplate Helmholtz Resonators for Active Noise Control Applications
",
39th AIAA Aerospace Sciences Meeting & Exhibit, AIAA Paper 2001-0817
, Reno, NV, January, 2001.
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S. Horowitz
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
Impedance tuning of an electromechanical acoustic liner
",
presentation at the 142nd Meeting of the Acoustic Society of America, The Journal of the Acoustical Society of America
, vol. 110, no. 5, pp. 2773, NOV, 2001.
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S. Horowitz
,
A K. V.S.
,
F. Liu
,
D. Johnson
,
T. Nishida
,
K. Ngo
,
M. Sheplak
, and
L. Cattafesta
,
"
Technology Development for Self-Powered Sensors
",
1st AIAA Flow Control Conference, AIAA Paper 2002-2702
, St. Louis, MO, June, 2002.
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S. Horowitz
,
T-A. Chen
,
L. Cattafesta
,
M. Sheplak
,
T. Nishida
, and
V. Chandrasekaran
,
"
Optical Flow Sensor Using Geometric Moire Interferometry
",
34th International Conference on Environmental Systems, SAE Paper 2004-01-2267
, Colorado Springs, CO, July, 2004.
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S. Horowitz
,
T-A. Chen
,
V. Chandrasekaran
,
K. Tedjojuwono
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
A Wafer-Bonded, Floating Element Shear-Stress Sensor
",
Solid State Sensor, Actuator and Microsystems Workshop
, Hilton Head, SC, pp. 13-18, June, 2004.
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S. Horowitz
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
Design and Characterization of a Micromachined Piezoelectric Microphone
",
11th AIAA/CEAS Aeroacoustics Conference, AIAA Paper 2005-2998
, May, 2005.
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S. Horowitz
,
M. Sheplak
,
L. Cattafesta
, and
T. Nishida
,
"
MEMS Acoustic Energy Harvester
",
5th International Workshop on Micro Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2005)
, Tokyo, Japan, November, 2005.
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S. Horowitz
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
Development of a micromachined piezoelectric microphone for aeroacoustics applications
",
J. Acoust. Soc. Am.
, vol. 122, no. 6, pp. 3428-3436, DEC, 2007.
Abstract
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S. Horowitz
,
T. Nishida
,
L. Cattafesta
, and
M. Sheplak
,
"
Characterization of Compliant-Backplate Helmholtz Resonators for an Electromechanical Acoustic Liner
",
40th AIAA Aerospace Sciences Meeting & Exhibit, AIAA Paper 2002-0666
, Reno, NV, January, 2002.
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S. Horowitz
,
M. Sheplak
,
L. Cattafesta
, and
T. Nishida
,
"
A MEMS Acoustic Energy Harvester
",
J. Micromech. Microeng.
, vol. 16, pp. S174-S181, SEP, 2006.
Abstract
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C-H. Hsu
,
T. Nishida
, and
C-T. Sah
,
"
Observation of threshold oxide electric field for trap generation in oxide films on silicon
",
Journal of Applied Physics
, vol. 63, no. 12, pp. 5882-5884, DEC, 1988.
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J
J. Jun
,
B. Chou
,
J. Lin
,
A. Phipps
,
X. Shengwen
,
K. Ngo
,
D. Johnson
,
A K. V.S.
,
T. Nishida
,
H. Wang
, et al.,
"
A hydrogen leakage detection system using self-powered wireless hydrogen sensor nodes
",
Solid-State Electronics
, vol. 51, pp. 1018-1022, JUL, 2007.
Abstract
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J. Jun
,
B. Chou
,
J. Lin
,
A. Phipps
,
X. Shengwen
,
K. Ngo
,
D. Johnson
,
A K. V.S.
,
T. Nishida
,
H. Wang
, et al.,
"
Low-Power Detection of Hydrogen Leakage Using a Self-Powered Wireless Hydrogen Sensor Node
",
2006 Spring Meeting of American Inst. Chem. Engineers
, Orlando, FL, April, 2006.
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