All faculty in IMG focus on the development or end-use of microscale electromechanical sensors/actuators (MEMS) enabled by micromachining technologies. Research efforts span from fundamental microfabrication process development and device modeling, through transducer design, fabrication, and characterization, and ultimately to implementation in larger functional systems. The transducers employ electrostatic, piezoelectric, piezoresistive, magnetic, optical, thermoelastic, or other means for sensing/actuation.