An electrothermal micromirror with dual reflective surfaces for circumferential scanning endoscopic imaging

Wu, L., and Xie, H., "An electrothermal micromirror with dual reflective surfaces for circumferential scanning endoscopic imaging," Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, No.1, 013030, March 2009. (Abstract)

Abstract: We report the design, fabrication, and measurements of a dual-reflective, single-crystal silicon-based micromirror that can perform circumferential scanning for endoscopic optical coherence tomography (EOCT). Full 360-deg optical scan angle (OSA) can be achieved by using a dual-reflective mirror with ±45-deg (or 90-deg) mechanical scan angle (MSA), where each reflective mirror surface contributes a 180-deg optical scanning. A novel surface- and bulk-combined micromachining process based on SOI wafers is developed for fabricating the dual reflective micromirror. The mirror flatness is maintained by the single-crystal-silicon device layer of SOI wafers, and aluminum is coated on both sides for reflection. A fabricated device demonstrated about half circumferential scanning range at resonance of 425 Hz. Other measured data include the radii of curvature, −129 mm (front surface) and 132 mm (back surface), and the reflectance, 86.3% (front surface) and 84.2% (back surface). This micromirror has the potential to realize full-circumferential- scanning EOCT imaging.