Wax-bonded NdFeB micromagnets for microelectromechanical systems application
Wang, N., Bowers, B., and Arnold, D.P., "Wax-bonded NdFeB micromagnets for microelectromechanical systems application," J. Appl. Phys., vol.103, pp. 07E109-1-3, April 2008. (Abstract)
Abstract: A microfabrication technique is reported for the fabrication of wax-bonded micromagnets in the 100 μm to 1 mm range. This dimensional size is not typically achievable by thin-film deposition techniques or by conventional macroscale magnet processing, and is of interest for magnetic MEMS applications. The magnet fabrication approach incorporates a wax powder binder to “lock” the magnetic microparticles together to improve the coercivity. In practice, NbFeB powder and wax powder is packed into pre-etched trenches in silicon wafer and subsequently heated, allowing the wax to melt and bond the magnetic powder. Using this method, 500 x 500 x 320 μm3 magnets have been demonstrated with a coercivity of 737 kA/m and a maximum energy product of 16.6 kJ/m3.

