Noise in P-type Piezoresistor
Sponsored by Boeing Company
Last Modified: Feb 14th 2008
Student Research Assistants
Description
Objectives
- Investigate and fabricate low noise piezoresistors through process fabrication, geometry, and correlation of noise to physical defects with techniques such as transmission electron microscopy (TEM), and deep level transient spectroscopy (DLTS)
Benefits
- Nowadays, the trend in integrated circuit (IC) technology is to fabricate small size devices while focusing simultaneously on improving their performance. The field of Microelectromechanical systems (MEMS) allows the fabrication of miniature sensors and actuators such as piezoresistive pressure sensors, microphones, accelerometers and cantilevers, which are used in automotive, aeronautic, environmental, and medical industries.
Goals
- Fabricate low noise MEMS piezoresistive transducers with low minimum detectable signal (MDS).
