Interdisciplinary Microsystems Group
Electrodynamic Microactuators
Sponsored by Interdisciplinary Microsystems Group
Last Modified: Nov 01st 2006

Schematic

Built-up SU-8 membrane

Electroplated coils

Powder Magnets

Investigators
Student Research Assistants
Description
Objectives
  • The project goal is to develop and deploy electrodynamic actuators. These minature systems could be designed as micro flow-control actuators, acoustic speakers, etc.
Benefits
  • Transduction is linear, conservative, and most importantly, direct (all electrical energy is converted to mechanical energy--no reflected energy).
  • Performance scales independent of length scale.
  • Good performance at low frequencies (<10 kHz)
Publications

Wang, N., and Arnold, D.P., "Electroplated Co-rich CoPt thick films and patterned arrays for magnetic MEMS," Intermag 2008, Madrid, Spain, May 2008.

Wang, N., Bowers, B., and Arnold, D.P., "Wax-bonded NdFeB micromagnets for microelectromechanical systems application," J. Appl. Phys., vol.103, pp. 07E109-1-3, April 2008. (Abstract)

Agashe, J., Sheplak, M., Arnold, D.P., and Cattafesta, L., "MEMS-based actuators for flow-control applications," IUTAM Symposium on Flow Control and MEMS, IUTAM Bookseries, Vol. 7, Morrison, J.F.; Birch, D.M.; Lavoie, P. (Eds.), pp. 25-32, 2008. (Abstract)

Bowers, B., Agashe, J., and Arnold, D.P., "A method to form bonded micromagnets embedded in silicon," Proc. 14th Int. Conf. Solid-State Sensors, Actuators, and Microsystems (Transducers 07), vol.2, pp. 1581-1584, June 2007. (Abstract)

Cattafesta, L., Arnold, D.P., and Sheplak, M., "Measurement needs and challenges for the characterization of flow control actuators," 25th AIAA Aerodynamic Measurement Technology and Ground Testing Conf., San Francisco, CA, June 2006.