This DURIP project enables the acquisition of an ultra-fast pulsed laser source to enable novel micro/nanomachined systems for DoD applications. The requested instrumentation will provide three-dimensional, optical, atmospheric micromachining capabilities to complement the precision machining and micro/nanofabrication facilities on campus. The synergy of 3D laser machining, high-speed micro/macro milling, and wafer-level batch-fabrication will enable new approaches for microsystem design and fabrication, paving the way for new device and system technologies.
From a micro-manufacturing standpoint, the cutting-edge femtosecond pulsed laser source provides the ability to machine a wide range of materials with extreme cutting precision, overcoming the limitations of common long-pulse laser machining systems. From an educational standpoint, femtosecond laser machining is a fertile research area, providing significant opportunities for student education and fundamental research. The interactions of femtosecond light pulses with various materials are still being explored, and the full capabilities of femtosecond laser micromachining are not fully known.
As a result, this system will simultaneously serve as a manufacturing tool and as a basic research and education platform. It will significantly enhance research efforts by multiple faculty in multiple research disciplines including microelectronics, MEMS, microfluidics, optics, materials, manufacturing, etc. The co-PI’s and other researchers at UF have a strong, proven record for development of cutting-edge microsystems (sensors, actuators, power converters) for aerospace, biomedical, communications, controls, chemical detection, energy conversion, and other applications of interest to DoD. The research and educational aspects afforded by this system will provide unique opportunities for technological breakthroughs over the next decade.