Interdisciplinary Microsystems Group at the University of Florida

Facilities

For equipment sign up, see the IMG Wiki.

IMG Labs

IMG laboratory facilities cover nearly 10,000 ft² of space in Benton Hall (1624 ft²), MAE-A (5382 ft²), Larsen Hall (1600 ft²), and the New Engineering Building (900 ft²). Clean room facilities are found in Benton Hall and the Physics Building. IMG holds office space in Benton Hall (1596 ft²), Larsen Hall, and the New Engineering Building.

Interdisciplinary Microsystems Lab (IML)
IML is a 1624 ft² general purpose microsystems lab located in Benton 210, 214, and 218 for microsystem device processing, packaging, characterization, and modeling.
- Fabrication
  - Wet-processing fume-hood
  - Labconco glove box
  - K&S ball bonder
  - EFD 2400 precision dispensing system
  - isc. device assembly equipment
  - LPKF printed-circuit board milling machine
  - Sherline desktop precision CNC milling machine
- Inspection
  - Olympus BX51 bright/dark-field/DIC optical microscope with xyz-measurement stage
  - Olympus BX60 bright-field optical microscope
  - Olympus SZX12 stereoscope
- Test
  - Tektronix TDS5104B 1 Ghz 4-channel digital phosphor oscilloscope
  - HP4294A vector impedance meter
  - Agilent 4155C semiconductor parameter analyzer
  - SRS SR785 spectrum analyzer
  - Polytec scanning micro-laser vibrometer
  - Bruel & Kjaer acoustic test and measurement equipment
  - Probe stations (2)
  - Assorted measurement/test equipment
- Computers & Software
  - 560 ft² computer lab with 10 general use computers and 7 workstations
  - COMSOL Multiphysics
  - ABAQUS (FEA)
  - Coventorware
  - L-Edit (mask layout)
  - Protel (PCB layout)
  - SPICE (circuit simulation)
  - Fluent (CFD)
Biophotonics and Microsystems Lab (BML)
The mission of the BML is to develop enabling micro/nanofabrication technology and build innovative integrated microsystems with improved performance, functionality and affordability for medical, industrial, space and consumer electronics applications. It is located in Larsen 136 and is approximately 1600 ft².
- Nikon Microscope
- HP70004A Optic spectrum Analyzer (70951A)
- Tektronix AFG3102 Dual channel Arbitrary/function generator 100MHz
- HP8648D Signal generator 9K-4000MHz
- HP Measurement unit for HP 4194A
- HP 4194A Impedance/Gain-phase analyzer
- Tektronix TAS455 two channel oscillosocpe, 60MHz
- Tektronic Oscilloscope TDS210, two-channel digital real time
- Drummond scientific company Drummond Nanoject II Nanodispenser
- Drummond Scientific Nanoject II Variable Volume 110V
- Drummond Scientific Nanoject Universal Adapter
- HP3577B network analyzer, 5MHz~200MHz
- Wentworth Probe station
- Tektronix TDS2014 Four Channel digital storage oscilloscope
- Blue M Single-wall Transite Oven
- HP 8561E Spectrum Analyzer, 30Hz~6.5GHz
- Agilent 33120A 15Mhz Function/Arbitrary Waveform Generator
- Instrument Research Company 17KV pulse generator
- T&L power conversion Inc. Ultra series power Amplifier
- Tektronix 2440 digital Oscilloscope, 500MS/s
Fluid Mechanics Lab
IMG holds 5382 ft² of facilities for fluid mechanics research in MAE-A.
- Acoustic Measurements
  - B&K condenser microphones, 1/4" freefield, 1/8" pressure field
  - 33-channel electret microphone array
  - 2" x 2" Quad driver acoustic liner plane wave tube (with optional grazing flow)
- Data Acquisition Systems
  - NI PXI System with 17x NI PXI-4462 cards
  - B&K Pulse Measurement System
  - HP VXI system
- Pressure Measurements
  - Pressure-sensitive paints
  - 48-channel static pressure measurement system
- Velocity Measurements
  - 3D Steroscopic Particle Image Velocimetry (PIV)
  - 3D Laser Doppler Velocimetry (LDV)
  - Hotwire Anemometer
- Wind tunnels
  - 12" x 12" low speed open jet ~30 m/s
  - 6" x 6" impeller driven wind tunnel ~ 60 m/s
  - 24" x 24" or 36" x 36" close circuit wind tunnel ~100 m/s
  - 2" x 2" supersonic wind tunnel, Mach = 1.6
  - 29" x 48" anechoic open jet ~75 m/s
  - 2" x 2" subsonic suction/blowdown wind tunnel, Mach = 0.3
Magnetic Microdevices Lab (MML)
The MML is a dedicated research lab focused on the development of microscale magnetic sensors/actuators and miniaturized power systems. The lab features specialized equipment for the development, processing, and characterization of thin film magnetic materials.
- Custom magnetic alloy electroplating stations
- Tektronix TecNu pulse reverse plating power supply
- LakeShore DSP 745 Gauss meter with custom Hall probes
- Oersted Technologies 340B pulse-discharge magnetizer with 4" magnetizing fixture
- ADE Technologies EV9 2.7 T vibrating sample magnetometer (VSM)
- Quantum Design MPMS 7T SQUID magnetometer (on campus)
- Quantum Design PPMS (on campus)
Microfluidics and BioMEMS Lab
The Microfluidics and BioMEMS Lab covers 900 ft² in the New Engineering Building. The focus of this lab is the development of microfluidics and BioMEMS technologies for biological applications. In analogy to shrinking a computer from the size of a room in the 1950s to a laptop today, instruments for chemical and biological analyses may be miniaturized using modern microfabrication technology.
- Fabrication
  - Carver Inc. Press, Manual Hydraulic
  - Flashcut Flashcut CNC Controller
  - Barnstead International Oven
  - Delta Band saw
  - Medrep Technologies Inc. Laminar Flow Hood
  - GBC Laminator
  - Laminar Flow Inc. Fume Hood
  - Barnstead International Furnace, programmable
  - Dremel Dremel Motor Tool
- Detection and Testing
  - Hammamatsu CCD Camera and controller
  - Apogee CCD Camera
  - Fisher Scientific Balance, accuSeries
  - Uniphase Laser, Argon Ion
  - Olympus Microscope, Inverted
  - Olympus Microscope, Inverted
  - Fischer Scientific Micromaster Microscope
  - ESI Group CFD-RC Software
  - Chroma Technology Filter, wavelength
  - KDScientific Syringe pump
  - World Precision Instruments Ultr Micropump II
  - Laser Fluorescence Detection System
  - CH Instruments Electrochemical Analyser
- Biological Analysis
  - Berthold Multimode Microplate Reader : Luminescence ,Fluorescence ,Absorbance
  - Eppendorf Centrifuge
  - Fisher Scientific Hotplate
  - Barnstead International Hotplate
  - Bio Rad IEF Cell
  - CH Instruments Electrochemical Analyser
  - Thermo Orion pH and pH/ISE Meters, Portable
  - Thermo Electron pH Electodes
  - GE Refrigerator (4 C and -20 C)
  - Revco Refrigerator (-70C)
  - New Brunswick Scientific Shaker
  - Branson Ultrasonic Bath
  - Fisher Scientific Vortexer, mini
  - RTS (Protein Expression System)
  - MJ Research PTC 100 PCR Machine
  - Fisher Scientific Accuseries balance (120 g - .01 mg)
  - OHAUS OHAUS balance Exp. Pro 4100g x 0.01g
  - Biorad BioRad Mini IEF, MiniProtean-3 Electrophoresis
- General
  - Companion Compressor, Air
  - Potentiostat
  - Glassman Power Supply, +10 KV (2)
  - Glassman Power Supply, +3KV
  - Glassman Power Supply, -3KV
  - Agilent Power Supply, Agilent
  - Agilent Power Supply, Agilent
  - Barnstead International Water Purifier: Nanopore
  - keithley Picoammeter: 486 picometer

Other Labs

IMG members have access to a number of labs on the University of Florida campus. The most notable are described below.

Major Analytical Instrumentation Center (MAIC)
The MAIC is a materials characterization and analysis facility established to provide analytical support for Florida's scientific and engineering community. A list of the available equipment can be found here.
UF Nanofabrication Facilities (UFNF)
The UFNF consist of two Class 100 cleanrooms (4500 ft² total) for semiconductor/microsystem processing and nanoscience research. A list of the available equipment can be found here.
UF Nanoscale Research Facility (NRF)
A new micro/nanofabrication facility is under construction with a scheduled opening date of Jan. 2008. This new facility is part of the larger Nanoscience Institute for Medical and Engineering Technologies (NIMET), aimed at synergizing the efforts of engineering, medical, chemistry, and physics faculty. The new building will provide 10,000 ft² of cleanroom space that will consolidate existing fabrication facilities and provide space/budget for additional state-of-the art equipment. Watch the construction progress here.

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Facilities For equipment sign up, see the IMG Wiki. IMG Labs IMG laboratory facilities cover nearly 10,000 ft² of space in Benton Hall (1624 ft²), MAE-A (5382 ft²), Larsen Hall (1600 ft²), and the New Engineering Building (900 ft²). Clean room facilities are found in Benton Hall and the Physics Building. IMG holds office space in Benton Hall (1596 ft²), Larsen Hall, and the New Engineering Building. Interdisciplinary Microsystems Lab (IML) IML is a 1624 ft² general purpose microsystems lab located in Benton 210, 214, and 218 for microsystem device processing, packaging, characterization, and modeling. Fabrication Wet-processing fume-hood Labconco glove box K&S ball bonder EFD 2400 precision dispensing system isc. device assembly equipment LPKF printed-circuit board milling machine Sherline desktop precision CNC milling machine Inspection Olympus BX51 bright/dark-field/DIC optical microscope with xyz-measurement stage Olympus BX60 bright-field optical microscope Olympus SZX12 stereoscope Test Tektronix TDS5104B 1 Ghz 4-channel digital phosphor oscilloscope HP4294A vector impedance meter Agilent 4155C semiconductor parameter analyzer SRS SR785 spectrum analyzer Polytec scanning micro-laser vibrometer Bruel & Kjaer acoustic test and measurement equipment Probe stations (2) Assorted measurement/test equipment Computers & Software 560 ft² computer lab with 10 general use computers and 7 workstations COMSOL Multiphysics ABAQUS (FEA) Coventorware L-Edit (mask layout) Protel (PCB layout) SPICE (circuit simulation) Fluent (CFD) Biophotonics and Microsystems Lab (BML) The mission of the BML is to develop enabling micro/nanofabrication technology and build innovative integrated microsystems with improved performance, functionality and affordability for medical, industrial, space and consumer electronics applications. It is located in Larsen 136 and is approximately 1600 ft². Nikon Microscope HP70004A Optic spectrum Analyzer (70951A) Tektronix AFG3102 Dual channel Arbitrary/function generator 100MHz HP8648D Signal generator 9K-4000MHz HP Measurement unit for HP 4194A HP 4194A Impedance/Gain-phase analyzer Tektronix TAS455 two channel oscillosocpe, 60MHz Tektronic Oscilloscope TDS210, two-channel digital real time Drummond scientific company Drummond Nanoject II Nanodispenser Drummond Scientific Nanoject II Variable Volume 110V Drummond Scientific Nanoject Universal Adapter HP3577B network analyzer, 5MHz~200MHz Wentworth Probe station Tektronix TDS2014 Four Channel digital storage oscilloscope Blue M Single-wall Transite Oven HP 8561E Spectrum Analyzer, 30Hz~6.5GHz Agilent 33120A 15Mhz Function/Arbitrary Waveform Generator Instrument Research Company 17KV pulse generator T&L power conversion Inc. Ultra series power Amplifier Tektronix 2440 digital Oscilloscope, 500MS/s Fluid Mechanics Lab IMG holds 5382 ft² of facilities for fluid mechanics research in MAE-A. Acoustic Measurements B&K condenser microphones, 1/4" freefield, 1/8" pressure field 33-channel electret microphone array 2" x 2" Quad driver acoustic liner plane wave tube (with optional grazing flow) Data Acquisition Systems NI PXI System with 17x NI PXI-4462 cards B&K Pulse Measurement System HP VXI system Pressure Measurements Pressure-sensitive paints 48-channel static pressure measurement system Velocity Measurements 3D Steroscopic Particle Image Velocimetry (PIV) 3D Laser Doppler Velocimetry (LDV) Hotwire Anemometer Wind tunnels 12" x 12" low speed open jet ~30 m/s 6" x 6" impeller driven wind tunnel ~ 60 m/s 24" x 24" or 36" x 36" close circuit wind tunnel ~100 m/s 2" x 2" supersonic wind tunnel, Mach = 1.6 29" x 48" anechoic open jet ~75 m/s 2" x 2" subsonic suction/blowdown wind tunnel, Mach = 0.3 Magnetic Microdevices Lab (MML) The MML is a dedicated research lab focused on the development of microscale magnetic sensors/actuators and miniaturized power systems. The lab features specialized equipment for the development, processing, and characterization of thin film magnetic materials. Custom magnetic alloy electroplating stations Tektronix TecNu pulse reverse plating power supply LakeShore DSP 745 Gauss meter with custom Hall probes Oersted Technologies 340B pulse-discharge magnetizer with 4" magnetizing fixture ADE Technologies EV9 2.7 T vibrating sample magnetometer (VSM) Quantum Design MPMS 7T SQUID magnetometer (on campus) Quantum Design PPMS (on campus) Microfluidics and BioMEMS Lab The Microfluidics and BioMEMS Lab covers 900 ft² in the New Engineering Building. The focus of this lab is the development of microfluidics and BioMEMS technologies for biological applications. In analogy to shrinking a computer from the size of a room in the 1950s to a laptop today, instruments for chemical and biological analyses may be miniaturized using modern microfabrication technology. Fabrication Carver Inc. Press, Manual Hydraulic Flashcut Flashcut CNC Controller Barnstead International Oven Delta Band saw Medrep Technologies Inc. Laminar Flow Hood GBC Laminator Laminar Flow Inc. Fume Hood Barnstead International Furnace, programmable Dremel Dremel Motor Tool Detection and Testing Hammamatsu CCD Camera and controller Apogee CCD Camera Fisher Scientific Balance, accuSeries Uniphase Laser, Argon Ion Olympus Microscope, Inverted Olympus Microscope, Inverted Fischer Scientific Micromaster Microscope ESI Group CFD-RC Software Chroma Technology Filter, wavelength KDScientific Syringe pump World Precision Instruments Ultr Micropump II Laser Fluorescence Detection System CH Instruments Electrochemical Analyser Biological Analysis Berthold Multimode Microplate Reader : Luminescence ,Fluorescence ,Absorbance Eppendorf Centrifuge Fisher Scientific Hotplate Barnstead International Hotplate Bio Rad IEF Cell CH Instruments Electrochemical Analyser Thermo Orion pH and pH/ISE Meters, Portable Thermo Electron pH Electodes GE Refrigerator (4 C and -20 C) Revco Refrigerator (-70C) New Brunswick Scientific Shaker Branson Ultrasonic Bath Fisher Scientific Vortexer, mini RTS (Protein Expression System) MJ Research PTC 100 PCR Machine Fisher Scientific Accuseries balance (120 g - .01 mg) OHAUS OHAUS balance Exp. Pro 4100g x 0.01g Biorad BioRad Mini IEF, MiniProtean-3 Electrophoresis General Companion Compressor, Air Potentiostat Glassman Power Supply, +10 KV (2) Glassman Power Supply, +3KV Glassman Power Supply, -3KV Agilent Power Supply, Agilent Agilent Power Supply, Agilent Barnstead International Water Purifier: Nanopore keithley Picoammeter: 486 picometer Other Labs IMG members have access to a number of labs on the University of Florida campus. The most notable are described below. Major Analytical Instrumentation Center (MAIC) The MAIC is a materials characterization and analysis facility established to provide analytical support for Florida's scientific and engineering community. A list of the available equipment can be found here. UF Nanofabrication Facilities (UFNF) The UFNF consist of two Class 100 cleanrooms (4500 ft² total) for semiconductor/microsystem processing and nanoscience research. A list of the available equipment can be found here. UF Nanoscale Research Facility (NRF) A new micro/nanofabrication facility is under construction with a scheduled opening date of Jan. 2008. This new facility is part of the larger Nanoscience Institute for Medical and Engineering Technologies (NIMET), aimed at synergizing the efforts of engineering, medical, chemistry, and physics faculty. The new building will provide 10,000 ft² of cleanroom space that will consolidate existing fabrication facilities and provide space/budget for additional state-of-the art equipment. Watch the construction progress here.