University of Florida
Oil film technique for visualizing flow over a 3-D turret
  • About Us
  • Research
    • Research Areas
    • Projects
    • Research Groups
      • BML
      • MnM Lab
  • People
    • Faculty
    • Members
    • Alumni
    • Member Map
  • Publications
  • Facilities
  • Sponsors
  • Contact
    • Contact Faculty
    • Contact List
    • Directions
  • Login
Home

An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications

PostDateIcon Wed, 01/11/2012 - 01:55 | PostAuthorIcon Matt Williams
TitleAn AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications
Publication TypeJournal Article
Year of Publication2012
AuthorsM. D. Williams, B. A. Griffin, T. N. Reagan, J. R. Underbrink, and M. Sheplak
JournalJournal of Microelectromechanical Systems
Volume21
Start Page270
Number2
Date Published04/2012
Type of ArticleJournal
Abstract

 

This paper describes the development of a micro-machined microphone for aircraft fuselage arrays that are utilized by aeroacousticians to help identify aircraft noise sources and/or assess the effectiveness of noise-reduction technologies.  The developed microphone utilizes piezoelectric transduction via an integrated aluminum nitride layer in a thin-film composite diaphragm. A theoretical lumped element model and an associated noise model of the complete microphone system are developed and utilized in a formal design-optimization process. Optimal designs were fabricated using a variant of the film bulk acoustic resonator process at Avago Technologies. The experimental characterization of one design is presented here, and measured performance was in line with sponsor specifications, including a sensitivity of −39 μV/Pa, a minimum detectable pressure of 40.4 dB, a confirmed bandwidth up to 20 kHz, a 129.5-kHz resonant frequency, and a 3% distortion limit approaching 172 dB. With this performance—in addition to its small size—this microphone is shown to be a viable enabling technology for low-cost high-resolution fuselage array measurements.
URLhttp://dx.doi.org/10.1109/JMEMS.2011.2176921
DOI10.1109/JMEMS.2011.2176921
Refereed DesignationRefereed
PostCategoryIcon XML  | PostCategoryIcon BibTex  | PostCategoryIcon Google Scholar
Calendar
«  

May

  »
S M T W T F S
 
 
 
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12
 
13
 
14
 
15
 
16
 
17
 
18
 
19
 
20
 
21
 
22
 
23
 
24
 
25
 
26
 
27
 
28
 
29
 
30
 
31
 
 
Add to calendar
Recent Publications
Microfabrication of High-Performance Thick Co80Pt20 Permanent Magnets for Microsystems Applications
Influence of temperature on the magnetic properties of electroplated Co-rich CoPt thick films
Progress toward mini and micro magnetic undulators
Magnetic collection of joint-level osteoarthritis biomarkers
Magnetic patterning of hard magnetic films for biomagnetic applications
more
Sponsors
SRC Logo
Boeing Company
Army Research Lab
National Aeronautics and Space Administration
Lockheed Martin
Office of Naval Research
Gulfstream Aerospace Corporation
DARPA
National Institutes of Health
Air Force Office of Scientific Research


Interdisciplinary Microsystems Group © 2010
MAE | ECE | ENG | UF | Sitemap | Contact Us | Webmaster